MALTA-Cz: a radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrate

Abstract Depleted Monolithic Active Pixel Sensor (DMAPS) sensors developed in the Tower Semiconductor 180 nm CMOS imaging process have been designed context of ATLAS ITk upgrade Phase-II at HL-LHC and for future collider experiments. The “MALTA-Czochralski (MALTA-Cz)” full size DMAPS sensor has with goal to demonstrate a radiation hard, thin high granularity, hit-rate capability, fast response time superior tolerance. design targets hardness > 10 15 (1 MeV) n eq /cm 2 100 Mrad TID. shall operate as tracking spatial resolution ≈ μm be able cope hit rates excess MHz/cm LHC bunch crossing frequency 40 MHz. 512 × pixel uses small collection electrodes (3.5 μm) minimize capacitance. (36.4 36.4 ) provides resolution. Its asynchronous readout architecture is hit-rates triggered trigger-less detector applications. stream all data multi-channel output which allows an off-sensor trigger formation use hit-time information event tagging. manufacturing optimised through adaptation special implant designs allow electrode on thick high-resistivity p-type Czochralski substrate. processing ensures excellent charge particle detection efficiency even after level radiation. Furthermore substrate improves sensor's This paper presents summary optimisation choices TCAD simulation model signal response. Beam laboratory test results unirradiated irradiated shown dose 1 MeV . measured σ = ns.